Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
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==Existing PID and Pyro Calibration Tables== | ==Existing PID and Pyro Calibration Tables== | ||
In order to guarantee a smooth temperature control while processing, it is important that the right couple of tables - PID and Pyrometer Calibration - are selected in the recipe. There are multiple '''[https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=459 | In order to guarantee a smooth temperature control while processing, it is important that the right couple of tables - PID and Pyrometer Calibration - are selected in the recipe. There are multiple PID and Pyro Calibration tables '''[https://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=459 (under Documents>Technical Documents)]''' available at the tool, which were developed and optimized by the process specialists in the Thin Film group. These are material-dependent, so they are labeled with abreviations of the conditions it should be used for. | ||
*PID tables - This table contains the necessary coefficients that regulate the power output, in a smooth and control way, to keep the temperature at the desired setpoint while processing. | *PID tables - This table contains the necessary coefficients that regulate the power output, in a smooth and control way, to keep the temperature at the desired setpoint while processing. | ||