Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
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==Existing PID and Pyro Calibration Tables== | ==Existing PID and Pyro Calibration Tables== | ||
In order to guarantee a smooth temperature control while processing, it is important that the right couple of tables - PID and Pyrometer Calibration - are selected in the recipe. There are multiple PID and Pyro Calibration tables available at the tool, which were developed and optimized by the process specialists in the Thin Film group. These are material-dependent, so they are labeled with abreviations of the conditions it should be used for. | In order to guarantee a smooth temperature control while processing, it is important that the right couple of tables - PID and Pyrometer Calibration - are selected in the recipe. There are multiple '''[https://labmanager.dtu.dk/function.php?module=Machine&view=view&page_id=169 PID and Pyro Calibration tables]''' available at the tool, which were developed and optimized by the process specialists in the Thin Film group. These are material-dependent, so they are labeled with abreviations of the conditions it should be used for. | ||
*PID tables - This table contains the necessary coefficients that regulate the power output, in a smooth and control way, to keep the temperature at the desired setpoint while processing. | *PID tables - This table contains the necessary coefficients that regulate the power output, in a smooth and control way, to keep the temperature at the desired setpoint while processing. | ||