Specific Process Knowledge/Thermal Process/RTP Jipelec 2: Difference between revisions
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==Existing PID and Pyro Calibration Tables== | ==Existing PID and Pyro Calibration Tables== | ||
In order to guarantee a smooth temperature control while processing, it is important that the right couple of tables - PID and | In order to guarantee a smooth temperature control while processing, it is important that the right couple of tables - PID and Pyrometer Calibration - are selected in the recipe. There are multiple PID and Pyro Calibration tables available at the tool, which were developed and optimized by the process specialists in the Thin Film group. These are material-dependent, so they are labeled with abreviations of the conditions it should be used for. | ||
*PID tables - This table contains the necessary coefficients that regulate the power output, in a smooth and control way, to keep the temperature at the desired setpoint while processing. | *PID tables - This table contains the necessary coefficients that regulate the power output, in a smooth and control way, to keep the temperature at the desired setpoint while processing. | ||
*Pyro Cal Tables - The optical pyrometer needs to be calibrated using a thermocouple as a reference, as optical pyrometry is | *Pyro Cal Tables - The optical pyrometer needs to be calibrated using a thermocouple as a reference, as optical pyrometry is an indirect method for measuring/controlling the temperature inside the chamber. As a result of such calibration process, a table is created. The pyrometer calibration table correlates temperatures recorded by the reference thermocouple with the electrical signals produced by the pyrometer. Essentially, this table functions as a 'translator,' indicating to the user the temperature corresponding to a specific output from the pyrometer. | ||
==Additional information== | ==Additional information== | ||
The '''user manual''', user '''APV''', '''technical documents and contact information''' can be found in LabManager: '''[http://www.labmanager.dtu.dk/function.php?module=Machine&view=view&mach=459 RTP2 Jipelec]''' | The '''user manual''', user '''APV''', '''technical documents and contact information''' can be found in LabManager: '''[http://www.labmanager.dtu.dk/function.php?module=Machine&view=view&mach=459 RTP2 Jipelec]''' | ||