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Specific Process Knowledge/Lithography/EBeamLithography/JEOLJobPreparation: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,179 edits
Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,179 edits
Line 408: Line 408:
|-
|-
! Typical beam current [nA] !! Aperture !! Condition file
! Typical beam current [nA] !! Aperture !! Condition file
|-
| 0.12 || 4 || 0.12na_ap4
|-
| 0.16 || 4 || 0.16na_ap4
|-
|-
| 0.227 || 4 || 0.22na_ap4
| 0.227 || 4 || 0.22na_ap4
|-
| 0.4 || 4 || 0.4na_ap4
|-
| 0.5 || 4 || 0.5na_ap4
|-
| 0.815 || 4 || 0.8na_ap4
|}
|}
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