Specific Process Knowledge/Wafer cleaning/7-up & Piranha: Difference between revisions
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*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=368 Fume hood 01 Info page in LabManager] | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=368 Fume hood 01 Info page in LabManager] | ||
*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=369 Fume hood 02 Info page in LabManager] | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=369 Fume hood 02 Info page in LabManager] | ||
*[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach= | *[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=169 Fume Hood 12 (Standard clean) Info page in LabManager] | ||
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MaskClean.jpg|Mask clean' bath in cleanroom D3 | MaskClean.jpg|Mask clean' bath in cleanroom D3 | ||
FH01-02.jpg|Fume hood 01 and 02 in cleanroom D3 | FH01-02.jpg|Fume hood 01 and 02 in cleanroom D3 | ||
FH12.JPG|Fume Hood 12 (Standard clean) in cleanroom B1 | |||
</gallery> | </gallery> | ||