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Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions

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|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
!Exposure tool
!Exposure tool
|align="center" colspan="5"|Mask aligner or Maskless aligner
|align="center" colspan="6"|Mask aligner or Maskless aligner
|-
|-


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*High aspect ratio
*High aspect ratio
*Resist thickness 1 µm to several 100 µm
*Resist thickness 1 µm to several 100 µm
*Available in cleanroom: 2005, 2035, and 2075
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|
Spray coater specific resist
Spray coater specific resist
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