Specific Process Knowledge/Thermal Process/Oxidation: Difference between revisions
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[[Specific Process Knowledge/Thermal Process/C4 Aluminium Anneal furnace|Al-Anneal furnace (C4)]] | [[Specific Process Knowledge/Thermal Process/C4 Aluminium Anneal furnace|Al-Anneal furnace (C4)]] | ||
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[[Oxidation 8" (E1)]] | [[Specific Process Knowledge/Thermal Process/E1 Furnace Oxidation (8")|Oxidation 8" (E1)]] | ||
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[[Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace|Resist Pyrolysis furnace (research tool)]] | [[Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace|Resist Pyrolysis furnace (research tool)]] | ||