Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
| Line 32: | Line 32: | ||
|0 | |0 | ||
|0 | |0 | ||
| | |0 | ||
| | |0 | ||
|- | |- | ||
!BCl<sub>3</sub> (sccm) | !BCl<sub>3</sub> (sccm) | ||
| Line 46: | Line 46: | ||
|5 | |5 | ||
|5 | |5 | ||
| | |5 | ||
| | |5 | ||
|- | |- | ||
!HBr (sccm) | !HBr (sccm) | ||
| Line 60: | Line 60: | ||
|15 | |15 | ||
|15 | |15 | ||
| | |15 | ||
| | |15 | ||
|- | |- | ||
! Coil power (W) | ! Coil power (W) | ||
| Line 74: | Line 74: | ||
|900 F | |900 F | ||
|900 L | |900 L | ||
| | |900 F | ||
| | |900 F | ||
|- | |- | ||
!Platen power (W) | !Platen power (W) | ||
| Line 88: | Line 88: | ||
|75 | |75 | ||
|60 | |60 | ||
| | |75 | ||
| | |75 | ||
|- | |- | ||
! Pressure (mtorr) | ! Pressure (mtorr) | ||
| Line 102: | Line 102: | ||
|2 | |2 | ||
|10 | |10 | ||
| | |2 | ||
| | |2 | ||
|- | |- | ||
!Temperature (<sup>o</sup>C) | !Temperature (<sup>o</sup>C) | ||
| Line 116: | Line 116: | ||
| 20 | | 20 | ||
| 50 | | 50 | ||
| | |50 | ||
| | |50 | ||
|- | |- | ||
! Spacers (mm) | ! Spacers (mm) | ||
| Line 130: | Line 130: | ||
| 100 | | 100 | ||
| 100 | | 100 | ||
| | | 100 | ||
| | | 30 | ||
|- | |- | ||
! Process time (s) | ! Process time (s) | ||
| Line 144: | Line 144: | ||
|300 | |300 | ||
|180 | |180 | ||
| | |180 | ||
| | |180 | ||
|- | |- | ||
! Nominal line width | ! Nominal line width | ||