Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF): Difference between revisions
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|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
! | ! | ||
! | ! 1% HF in RCA Bench | ||
! 1% / 5% HF PP-bath | ! 1% / 5% HF PP-bath | ||
! 1% / 5% HF Plastic beaker | ! 1% / 5% HF Plastic beaker | ||