Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 02 processing: Difference between revisions
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'''Pneumatic:''' | '''Pneumatic:''' | ||
Substrates must be at least 5x5 mm to be successfully loaded. The pneumatic AF freezes at a distance of 3 mm form the substrate edge, which means that in order to have any ''dynamic'' focusing, using the pneumatic AF, the substrate must be larger than 6x6 mm. | Substrates must be at least 5x5 mm to be successfully loaded. The pneumatic AF freezes at a distance of 3 mm form the substrate edge, which means that in order to have any ''dynamic'' focusing, using the pneumatic AF, the substrate must be larger than 6x6 mm. When using the pneumatic autofocus, we recommend a substrate size of at least 20x20 mm. | ||
==Exposure mode== | ==Exposure mode== | ||