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Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
2,178 edits
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|-
|-
| 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520_cas.png|800px]] || 4A: (90.000, 55.000)
| 4" || BSPCL-520 || 4A, 4B, 4C || Ti || [[image:BSPCL-520_cas.png|800px]] || [[image:BSPCL-520 small.png|300px]]
4B: (210.000, 55.000)
 
4C: (150.000, 185.000)


|-
|-
| 4" || BM2P-011 || 4D, 4E || Al || [[image:BM2P-011_cas.png|800px]] || 4D: (190.000, 65.000)
| 4" || BM2P-011 || 4D, 4E || Al || [[image:BM2P-011_cas.png|800px]] || [[image:BM2P-011 small.png|300px]]
4E: (100.000, 175.000)


|-
|-
| 6" || BW6-009 || 6A || Al || [[image:BW6-009.png|800px]] || 6A: (140.000, 120.000)
| 6" || BW6-009 || 6A || Al || [[image:BW6-009.png|800px]] || [[image:BW6-009 small.png|300px]]
|-
|-
| 6" || BW6-042 || 6A || Al || [[image:BW6-042_cas.png|800px]] || 6A: (140.000, 120.000)
| 6" || BW6-042 || 6A || Al || [[image:BW6-042_cas.png|800px]] || [[image:BW6-009 small.png|300px]]
|-
|-
| 8" || BSPCL-514 || 8A || Ti || [[image:BPSPCL-514_cas.png|800px]] || 8A: (189.000, 73.500)
| 8" || BSPCL-514 || 8A || Ti || [[image:BPSPCL-514_cas.png|800px]] || [[image:BW6-009 small.png|300px]]
|-
|-
| Mask || B6025-025 ||  || Ti || [[image:B6025-025.png|800px]] || (140.000, 120.000)
| Mask || B6025-025 ||  || Ti || [[image:B6025-025.png|800px]] || (140.000, 120.000)
|}
|}
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