Jump to content

Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions

Thope (talk | contribs)
Thope (talk | contribs)
Line 85: Line 85:
| 2" || BM6P-502 || 2A, 2B, 2C, 2D, 2E, 2F || Ti || [[image:BM6P-502_cas.png|800px]] || [[image:BM6P-502 small.png|300px]]
| 2" || BM6P-502 || 2A, 2B, 2C, 2D, 2E, 2F || Ti || [[image:BM6P-502_cas.png|800px]] || [[image:BM6P-502 small.png|300px]]
|-
|-
| 3" || BM4P-021 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-021_cas.png|800px]] || 3A: (80.000, 60.000)
| 3" || BM4P-021 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-021_cas.png|800px]] || [[image:BM4P-509 small copy.png|300px]]
3B: (200.000, 60.000)
 
3C: (80.000, 180.000)
 
3D: (200.000, 180.000)


|-
|-
| 3" || BM4P-025 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-025_cas.png|800px]] || 3A: (80.000, 60.000)
| 3" || BM4P-025 || 3A, 3B, 3C, 3D || Al || [[image:BM4P-025_cas.png|800px]] || [[image:BM4P-509 small copy.png|300px]]
3B: (200.000, 60.000)
 
3C: (80.000, 180.000)
 
3D: (200.000, 180.000)


|-
|-