Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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== Stage position and cassette orientation== | == Stage position and cassette orientation== | ||
The stage control window indicates where the stage is currently placed. It indicates this position with a coordinate and a small, red indicator inside the blue box, as illustrated below. | The stage control window indicates where the stage is currently placed. It indicates this position with a coordinate and a small, red indicator inside the blue box, as illustrated below. Sadly, the system does not indicate how the cassette or cassette slots are placed, thus we have provided an approximate illustration of this below. This can be used as a sanity check to verify that the system is working on the correct cassette slot. In the example below, slot A of the chips cassette is being exposed. Similar illustrations for other cassettes are provided in the cassettes overview table further down this page. | ||
{| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" | ||