Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace: Difference between revisions
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==Process information== | ==Process information== | ||
*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]] | *[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Acceptance test|Results from the Resist Pyrolysis (former Multipurpose Anneal) furnace acceptance test]] | ||
*[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Pyrolysis_with_Resist_Pyrlysis_furnace|Resist pyrolysis]] | *[[Specific_Process_Knowledge/Thermal_Process/Resist_Pyrolysis_furnace/Pyrolysis_with_Resist_Pyrlysis_furnace|Resist pyrolysis]] | ||
*Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page | *Annealing: look at the [[Specific Process Knowledge/Thermal Process/Annealing|Annealing]] page | ||