Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace: Difference between revisions
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[[Image:ATV_ovn_boat.jpg|thumb|335x335px|Boat with wafers for the Multipurpose Annealing Furnace. Photo: DTU Nanolab internal]] | [[Image:ATV_ovn_boat.jpg|thumb|335x335px|Boat with wafers for the Multipurpose Annealing Furnace. Photo: DTU Nanolab internal]] | ||
From February 2024: The name of the furnace has changed from Multipurpose Anneal Furnace to Resist Pyrolysis Furnace. At the same time, the furnace has become a research tool. This means, that the furnace is mainly available for users working on certain research projects at DTU Nanolab, and it should mainly be used for resist pyrolysis | From February 2024: The name of the furnace has changed from Multipurpose Anneal Furnace to Resist Pyrolysis Furnace (or “Furnace: Resist Pyrolysis” in LabManager). At the same time, the furnace has become a research tool. This means, that the furnace is mainly available for users working on certain research projects at DTU Nanolab, and it should mainly be used for resist pyrolysis | ||
The Resist Pyrolysis furnace it made by ATV Technologie, and it was installed in the cleanroom in 2015. | The Resist Pyrolysis furnace it made by ATV Technologie, and it was installed in the cleanroom in 2015. | ||
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'''The user manual, technical information and contact information can be found in LabManager:''' | '''The user manual, technical information and contact information can be found in LabManager:''' | ||
'''[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=340 Furnace: | '''[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=340 Furnace: Resist Pyrolysis]''' | ||
==Process information== | ==Process information== | ||