Specific Process Knowledge/Thermal Process/Resist Pyrolysis furnace: Difference between revisions

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 [[Category: Furnaces|A2]]
-==The Multipurpose annealing furnace==
+==The Resist Pyrolysis furnace==
 [[Image:ATV_ovn.jpg|thumb|365x365px|Multipurpose Annealing Furnace. Positioned in cleanroom B-1. Photo: DTU Nanolab internal]]
 [[Image:ATV_ovn_boat.jpg|thumb|335x335px|Boat with wafers for the Multipurpose Annealing Furnace. Photo: DTU Nanolab internal]]
-The Multipurpose Annealing Furnace it made by ATV Technologie, and it was installed in the cleanroom in 2015.
+From February 2024: The name of the furnace has changed from Multipurpose Anneal Furnace to Resist Pyrolysis Furnace. At the same time, the furnace has become a research tool. This means, that the furnace is mainly available for users working on certain research projects at DTU Nanolab, and it should mainly be used for resist pyrolysis
-The purpose of the Multipurpose Annealing Furnace is annealing and dry oxidation of different samples and resist pyrolysis. Annealing and resist pyrolysis can be done in vacuum or at atmospheric pressure, in a N<sub>2</sub> or H<sub>2</sub> atmosphere or a mixture of the two gasses.
+The Resist Pyrolysis furnace it made by ATV Technologie, and it was installed in the cleanroom in 2015.
-All process gasses (except purge nitrogen) are heated, before they are introduced into the furnace at the door side.
+The furnace is mainly being used for resist pyrolysis (see the next section). It can also be used for annealing in nitrogen (N2) and oxidation with oxygen (O2), but O2 is mostly used for cleaning of the furnace after resist pyrolysis.
-Is is possible to change all quartz ware in the furnace (the furnace tube, the door sealing and the wafer boat). At the moment Nanolab has two different sets of quartz ware:
+Process steps can run either in vacuum or at atmospheric pressure. A small N2 or O2 flow (up to 2 slm) can be applied in vacuum steps.
-*Metal: Dedicated for different samples that cannot be RCA cleaned. Also samples with metals are allowed in the furnace, when this quartz set is mounted
+The quartz parts in the furnace can be changed, depending on what processes and samples the furnace is used for, but it been decided that a quartz set for resist resist pyrolysis will be mounted in the furnace all the time. This limits the number of materials that are allowed in the furnace (see section 7.2).
-*Resist pyrolysis: Dedicated for resist pyrolysis.
-Please note that all new materials have to be approved by the Thin Film group (thinfilm@nanolab.dtu.dk) before they are allowed in the furnace.
+All process gasses (except purge nitrogen) are heated, before they are introduced into the furnace at the door side.
 The furnace tube is heated by use of 12 long heaters situated along the furnace tube and combined in three groups (top, bottom left and bottom right) and two flat heaters situated in the ends of the furnace tube. The this way the temperature will be very uniform everywhere in the furnace tube. The heating can be done very fast, up to 30 <sup>o</sup>C/min. For atmospheric pressure processes the maximum temperature is 1100 <sup>o</sup>C, and for vacuum processes the maximum temperature is 1050 <sup>o</sup>C.
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 '''[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=340 Furnace: Multipurpose annealing]'''
 ==Process information==