Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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Back side (left )and front side view (right) of the 4" wafer titanium cassette (BSPCL-520). | Back side (left )and front side view (right) of the 4" wafer titanium cassette (BSPCL-520). | ||
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== Stage position and cassette orientation== | |||
The stage control window indicates where the stage is currently placed. It indicates this position with a coordinate and an indicate inside the blue box | |||
== Coordinate system == | == Coordinate system == | ||