Specific Process Knowledge/Lithography/CSAR: Difference between revisions
| Line 198: | Line 198: | ||
<br> | <br> | ||
== Contrast | == Contrast Curve == | ||
=== CSAR 6200.09 === | === CSAR 6200.09 === | ||
100 nm lines in both ~70 nm and ~188 nm thick CSAR has been developed with AR-600-546 (standard CSAR developer) at room temperature. | 100 nm lines in both ~70 nm and ~188 nm thick CSAR has been developed with AR-600-546 (standard CSAR developer) at room temperature to provide the following contrast curves. | ||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" style="width: 95%" | {|border="1" cellspacing="0" cellpadding="3" style="text-align:left;" style="width: 95%" | ||