Specific Process Knowledge/Thin film deposition/Deposition of Copper: Difference between revisions
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==Studies of Cu deposition== | ==Studies of Cu deposition== | ||
[[/Deposition of Copper/Resistive thermal evaporation of Copper|Resistive thermal evaporation of copper]] | |||
[[/Deposition of Copper|Roughness of Cu layers]] - ''Roughness of Cu layers deposited with the Alcatel e-beam evaporator'' - this particular machine has been decommissioned, but the results may still be of interest. | [[/Deposition of Copper|Roughness of Cu layers]] - ''Roughness of Cu layers deposited with the Alcatel e-beam evaporator'' - this particular machine has been decommissioned, but the results may still be of interest. | ||