Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch/Cr mask: Difference between revisions
Appearance
| Line 84: | Line 84: | ||
|} | |} | ||
===Profile SEM images=== | ===Profile SEM images=== | ||
{| border="2" cellspacing="2" cellpadding="3" | {| border="2" cellspacing="2" cellpadding="3" style="width: 100%;" | ||
!Recipe settings | !Recipe settings | ||
!Comments | !Comments | ||