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Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-4/SiO2 Etch/Cr mask: Difference between revisions

Bghe (talk | contribs)
Bghe (talk | contribs)
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===Profile SEM images===
===Profile SEM images===
{| border="2" cellspacing="2" cellpadding="3"  
{| border="2" cellspacing="2" cellpadding="3" style="width: 100%;"
!Recipe settings
!Recipe settings
!Comments
!Comments