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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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{| border="2" cellspacing="1" cellpadding="3" align="center"
{| border="2" cellspacing="1" cellpadding="3" align="center"
!Recipe
!Recipe Sinano#
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano3|Sinano3.0]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano3|3.0]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano31|Sinano3.1]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano31|3.1]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano32|Sinano3.2]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano32|3.2]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan33|Sinano3.3]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan33|3.3]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano34|Sinano3.4]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano34|3.4]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano4|Sinano4.0]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano4|4.0]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano35|Sinano3.5]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano35|3.5]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano36|Sinano3.6]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano36|3.6]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan33-2|Sinano3.3]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan33-2|3.3]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan37|Sinano3.7]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan37|3.7]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan331|Sinano3.31]]
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan331|3.31]]
|-
|-
!Cl<sub>2</sub> (sccm)
!Cl<sub>2</sub> (sccm)
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|-
|-
! Coil power (W)
! Coil power (W)
|900 (Load)
|900 L
|900 (Forward)
|900 F
|900 (Forward)
|900 F
|900 (Forward)
|900 F
|900 (Forward)
|900 F
|900 (Load)
|900 L
|900 (Load)
|900 L
|900 (Forward)
|900 F
|900 (Forward)
|900 F
|900 (Load)
|900 L
|
|
|-
|-
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