Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions

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==This page is under construction==
==DRIE-Pegasus==


The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further.
The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further.


===[[Advanced_Silicon_Etcher_-_Pegasus|Details on DRIE-Pegasus]]===
Further info:


[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ|FAQ (Under construction)]]
[[Specific Process Knowledge/Etch/DRIE-Pegasus/FAQ|FAQ (Under construction)]]


[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch (Under construction)]]
[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch (Under construction)]]

Revision as of 07:42, 6 April 2011

DRIE-Pegasus

The DRIE-Pegasus takes the well established Bosch process known from the ASE a significant step further.

Details on DRIE-Pegasus

Further info:

FAQ (Under construction)

Nanoetch (Under construction)

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