Specific Process Knowledge/Lithography/EBeamLithography/AR-P 617: Difference between revisions
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AR-P 617.06 contrast curve. | AR-P 617.06 contrast curve from three different soft bake temperatures. Fitted lines are for determining contrast. | ||
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Based on the fitted lines the contrasts are found to be 3.7, 4.2 and 4.3 for the 200C, 180C and 160 soft bake temperatures, respectively. | |||
=Development= | =Development= | ||