Specific Process Knowledge/Lithography/Coaters/labspin: Difference between revisions
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|-style="background:silver; color:black" | |-style="background:silver; color:black" | ||
!Bowlset name | |||
!Component solvent | !Component solvent | ||
!Cleaning solvent | !Cleaning solvent | ||
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|PGMEA/Ethyl Lactate | |PGMEA/Ethyl Lactate | ||
|Acetone | |Acetone | ||
|AZ 5214E | | | ||
mr-I8100R | AZ 5214E<br> | ||
|Two | AZ 4562<br> | ||
AZ MiR 701<br> | |||
AZ nLOF 2000 series<br> | |||
mr-I8100R | |||
|Two bowlsets available | |||
|- | |- | ||
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|Anisole | |Anisole | ||
|Remover 1165 | |Remover 1165 | ||
|AR-P 6200 series (CSAR 62) | | | ||
UV5 | AR-P 6200 series (CSAR 62)<br> | ||
ZEP520A<br> | |||
mr EBL 6000<br> | |||
PMMA (in anisole)<br> | |||
UV5<br> | |||
mr-T85L<br> | |||
XNIL26<br> | |||
mri8000<br> | |||
mr-I 7010E<br> | |||
mr-XNIL26_SF<br> | |||
mrNIL210 | |||
| | | | ||
|- | |- | ||
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|MIBK/PGMEA | |MIBK/PGMEA | ||
|Acetone | |Acetone | ||
|HSQ (FOx series) | | | ||
HSQ (FOx series)<br> | |||
AR-N 8200 | |||
| | | | ||
|- | |- | ||
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|Propyl Acetate | |Propyl Acetate | ||
|Acetone | |Acetone | ||
|OrmoComp | | | ||
Inkron | OrmoComp<br> | ||
OrmoStamp<br> | |||
OrmoPrime<br> | |||
OrmoClad<br> | |||
Inkron<br> | |||
mr-I-7030R<br> | |||
mr-I 8020E<br> | |||
mr-I-7010E<br> | |||
mrNIL210<br> | |||
mr-I 8500E<br> | |||
mr-T85<br> | |||
MRT HI01XP<br> | |||
Protek B3<br> | |||
mrUVCur21<br> | |||
mr-I 8100E_XP<br> | |||
mrNIL210<br> | |||
MRT HI01XP<br> | |||
mr-NIL 6000.3E<br> | |||
mr-I 8100R_XP | |||
| | | | ||
|- | |- | ||
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|Mesitylene | |Mesitylene | ||
|T1100 | |T1100 | ||
|3022-X | | | ||
3022-X<br> | |||
4022-X | |||
| | | | ||
|- | |- | ||
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|Cyclopentanone/PGMEA | |Cyclopentanone/PGMEA | ||
|Acetone | |Acetone | ||
|SU-8 2000 series | | | ||
mr-i 8030e | SU-8 2000 series<br> | ||
mr-DWL<br> | |||
LOR (1A, 3A, 5A)<br> | |||
mr-i 8030e<br> | |||
mr-NIL200<br> | |||
DELO-PRE/OM4310<br> | |||
OrmoStamp<br> | |||
Inkron<br> | |||
mr-I 8020E<br> | |||
OM4310 | |||
| | | | ||
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Latest revision as of 10:52, 7 February 2024
Spin coater: Labspin
|
|
| Spin Coater: Labspin 02 | Spin Coater: Labspin 03 + fumehood 11 |
| Loacted in wetbench 08 in E-5 | Located in wetbench 09 in E-5 |
| LabSpin 6, Süss MicroTec | LabSpin 6, Süss MicroTec |
Training video: LabSpin02 + 03
Process information
Spin curves (LabSpin 6):
More information on resists (incl. spin curves) is available in the resist overview.
Available bowlsets:
| Bowlset name | Component solvent | Cleaning solvent | List of resists | Comments |
|---|---|---|---|---|
| AZ resist | PGMEA/Ethyl Lactate | Acetone |
AZ 5214E |
Two bowlsets available |
| CSAR/ZEP/mrEBL/PMMA | Anisole | Remover 1165 |
AR-P 6200 series (CSAR 62) |
|
| HSQ/AR-N 8200 | MIBK/PGMEA | Acetone |
HSQ (FOx series) |
|
| OrmoComp/OrmoStamp | Propyl Acetate | Acetone |
OrmoComp |
|
| BCB/CYCLOTENE | Mesitylene | T1100 |
3022-X |
|
| Epoxy/Acrylate | Cyclopentanone/PGMEA | Acetone |
SU-8 2000 series |
|
| AR-P 617/AR-N 7520 | PGME/PGMEA | Acetone | AR-N 7500 series | |
| Polymer Ps-b-PDMS/block copolymer | Heptane | Ethyl Acetate | ||
| DIRTY bowlset | Anything Organic | Use the appropriate cleaning reagent for your resist |
| Purpose | Labspin |
Spin coating of resist ONLY in dedicated bowlsets Please do NOT use substances which is not for the dedicated bowlsets |
|---|---|---|
| All purpose |
Spin coating of dirty substances in All purpose
| |
| Process parameters | Spin speed |
|
| Spin acceleration |
| |
| Substrates | Substrate size |
|
| Allowed materials |
All cleanroom materials Please ONLY use substances which is for the dedicated bowlsets in labspins | |
| Batch |
1 |