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Specific Process Knowledge/Lithography/Coaters/labspin: Difference between revisions

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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,915 edits
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|style="background:LightGrey; color:black"|Spin speed
|style="background:LightGrey; color:black"|Spin speed
|style="background:WhiteSmoke; color:black"|
|style="background:WhiteSmoke; color:black"|
*Vacuum chuck: 100 - 5000 rpm <br>
*Vacuum chuck: 100 - 8000 rpm <br>
*Edge handling chuck: Max. 3000 rpm
*Edge handling chuck: Max. 3000 rpm
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