Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy: Difference between revisions
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Started section regarding tip status |
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|+ | |+ Comparison between images of the Tip Checker sample | ||
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! !! SEM Image !! Worn Probe !! New probe | ! !! SEM Image !! Worn Probe !! New probe | ||
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! Image | ! Image | ||
| SEM | | [[File:AFMWornTip.jpg|thumb|left|alt=SEM image of Tip checker sample| SEM image of the tip checker sample (placeholder)]] | ||
| [[File:AFMWornTip.jpg | | [[File:AFMWornTip.jpg|thumb|left|alt=Image taken using a worn probe| AFM image of the tip checker sample taken using a wornAFM probe]] | ||
| [[File:AFMNewTip.jpg | | [[File:AFMNewTip.jpg|thumb|left|alt=Image taken using a new probe| AFM image of the tip checker sample taken using a new AFM probe]] | ||
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! | ! Image Parameters and | ||
Roughness information | Roughness information | ||
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* Acceleration voltage: 3kV | |||
* Detector: SE | |||
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* Size: 1µm | * Size: 1µm | ||
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! Comments | ! Comments | ||
| Example | | Example | ||
| | | The shape of the probe causes all features to look like an oval pointing towards the top left of the image. Low measured roughness as the tip skates across the top of the tips. | ||
| | | Same sample taken with a new probe. The triangular structures are pointing in different directions, as expected based on SEM image. Higher measured roughness as the sharper tip can map the trenches between the tips. | ||
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