Specific Process Knowledge/Lithography/EBeamLithography/AR-P 617: Difference between revisions
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Resulting resist thickness can be determined as y = ax<sup>b</sup>, where y is thickness [nm], x is spin speed [RPM], a = | Resulting resist thickness can be determined as y = ax<sup>b</sup>+c, where y is thickness [nm], x is spin speed [RPM], a = 65274, b = -0.748 and c = 163.1. | ||
=Contrast curve= | =Contrast curve= | ||