Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/SiO2 etch: Difference between revisions
Appearance
| Line 29: | Line 29: | ||
[[File:Peg3 SiO2 uniformity Y34 to Y40.jpg|400px]] | [[File:Peg3 SiO2 uniformity Y34 to Y40.jpg|400px]] | ||
[[File:Peg3 SiO2 uniformity normalized Y34 to Y40.jpg|400px]] | [[File:Peg3 SiO2 uniformity normalized Y34 to Y40.jpg|400px]] | ||