Specific Process Knowledge/Etch/DRIE-Pegasus/Pegasus-3/SiO2 etch: Difference between revisions
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==Test work done== | ==Test work done== | ||
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|+ Tests with SiO2 etch | |+ Tests with SiO2 etch | ||
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| Example || Example || Example || Example || Example || Example || Example | | Example || Example || Example || Example || Example || Example || Example | ||
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[[File:Peg3 SIO2 uniformity - Contour Plot 5.jpg|400px]] | |||