Revision as of 13:40, 25 January 2024

Etching of very thin layer of SiO2

Pegasus 3 is not meant to be used as an SiO2 etcher. Please do not develop nice SiO2 recipes on this machine. Often SIO2 etch recipes are very polymerizing and that can disturb the chamber conditions for the silicon etching recipes.

The recipe developed here is only for etching through a very thin SiO2 layer and does not have a high selectivity to silicon to avoid the recipe to become too polymerizing. It is also not very uniform over the wafer, so when it is used for etching down to silicon it will also etch a lot in the silicon and in areas more than other.

Test work done

Unless otherwise stated, all content in this section was done by Berit Herstrøm, DTU Nanolab

Tests with SiO2 etch
C4F8	SF6 flow	Ar	Coil power	Platen power	Presure	Header text
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