Specific Process Knowledge/Characterization/Stress measurement/Stress origins: Difference between revisions
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To learn more generally about stress in thin films, we recommend the classical article by John A. Thornton and D. W. Hoffman from 1979, [https://www.sciencedirect.com/science/article/pii/0040609089900308 Stress-related effects in thin films], and other articles by the same author. The tutorial by E. Chason refers back to the model of thin film growth developed in that paper. | To learn more generally about stress in thin films, we recommend the classical article by John A. Thornton and D. W. Hoffman from 1979, [https://www.sciencedirect.com/science/article/pii/0040609089900308 Stress-related effects in thin films], and other articles by the same author. The tutorial by E. Chason refers back to the model of thin film growth developed in that paper. | ||
'Note this page is in progress - comments are very welcome.' | ''Note this page is in progress - comments are very welcome.'' | ||