Specific Process Knowledge/Thin film deposition/Deposition of Alumina: Difference between revisions
Appearance
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!Process Temperature | !Process Temperature | ||
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* | * room temperature | ||
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* Up to 600 °C | * Up to 600 °C | ||
| Line 94: | Line 94: | ||
!Process Temperature | !Process Temperature | ||
| | | | ||
* | * room temperature | ||
| | | | ||
* Up to 600 °C | * Up to 600 °C | ||