Specific Process Knowledge/Characterization/Topographic measurement: Difference between revisions
| Line 77: | Line 77: | ||
|Depending on the objective: | |Depending on the objective: | ||
*0.5µm -> 5µm | *0.5µm -> 5µm | ||
|Resolving power | |Resolving power of the lens: 0.92 µm | ||
|Depending on scan size and number of samples per line and number of lines - accuracy better than 2% | |Depending on scan size and number of samples per line and number of lines - accuracy better than 2% | ||
|down to 0.003 µm | |down to 0.003 µm | ||