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Specific Process Knowledge/Lithography/EBeamLithography/AR-P 617: Difference between revisions

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Thope (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab347-labadviser-users-35231
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*Baking temperature: 200C (setpoint at 222C)
*Baking temperature: 200C (setpoint at 222C)
*Baking time: 120 s
*Baking time: 120 s


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AR-P 617.06 spin curve.
AR-P 617.06 spin curve.
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Resulting resist thickness can be determined as y = ax<sup>b</sup>, where y is thickness, x is spin speed, a = 11664 and b = -0.442.
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