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Specific Process Knowledge/Lithography/EBeamLithography/AR-P 617: Difference between revisions

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AR-P 617 is a positive PMMA based E-beam resist from Allresist. [https://www.allresist.com/wp-content/uploads/sites/2/2020/03/AR-P610_english_Allresist_product-information.pdf|Process information provided by Allresist can be found here.]
AR-P 617 is a positive PMMA based E-beam resist from Allresist. [https://www.allresist.com/wp-content/uploads/sites/2/2020/03/AR-P610_english_Allresist_product-information.pdf | Process information provided by Allresist can be found here.]


=Spin coating=
=Spin coating=
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