Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano11: Difference between revisions
New page: == The nano1.1 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.1''' |- ! rowspan="6" align="center"| Recipe | Gas | C<sub>4</sub>F<sub>8</sub> 38 sccm, SF<sub>... |
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<gallery caption="The results of the nano1. | <gallery caption="The results of the nano1.1 recipe" widths="250" heights="200" perrow="3"> | ||
image:WF_2C4_feb2011_030.jpg |The 30 nm trenches | image:WF_2C4_feb2011_030.jpg |The 30 nm trenches | ||
image:WF_2C4_feb2011_060.jpg|The 60 nm trenches | image:WF_2C4_feb2011_060.jpg|The 60 nm trenches | ||