Specific Process Knowledge/Thermal Process/Annealing: Difference between revisions
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*Silicon oxides and nitrides | *Silicon oxides and nitrides | ||
*Quartz | *Quartz | ||
*Metals - ask for | *Metals - ask for permission | ||
*III-V materials - '''below 440 °C''', otherwise it can lead to outgassing of toxic gases. | *III-V materials - '''below 440 °C''', otherwise it can lead to outgassing of toxic gases. | ||
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