Specific Process Knowledge/Thermal Process/Annealing: Difference between revisions
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**Clean: Samples that have been RCA cleaned | **Clean: Samples that have been RCA cleaned | ||
**Metal: Almost all materials, permission is needed | **Metal: Almost all materials, permission is needed | ||
**Resist pyrolysis | **Resist (for pyrolysis) | ||
| | |||
*Silicon | |||
*Silicon Nitride | |||
*Aluminum Oxide | |||
|- | |- | ||
|} | |} | ||
<br clear="all" /> | <br clear="all" /> | ||