Specific Process Knowledge/Thermal Process/Annealing: Difference between revisions
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*H<sub>2</sub> | *H<sub>2</sub> | ||
*H<sub>2</sub>-N<sub>2</sub> gas mixture | *H<sub>2</sub>-N<sub>2</sub> gas mixture | ||
*Vacuum is possible | *Vacuum is possible | ||
| | |||
*Ar | |||
*NH<sub>3</sub> | |||
*H<sub>2</sub> | |||
*H<sub>2</sub>-N<sub>2</sub> gas mixture | |||
*Vacuum is possible | |||
|- | |- | ||