Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
| Line 46: | Line 46: | ||
The substrate must overlap at least 0.5 mm on both sides of the slot. Hence the height of a chip must be at least 1 mm larger than the slot height, i.e. in order to use slot 3B the chip height must be at least 13.0 mm. | The substrate must overlap at least 0.5 mm on both sides of the slot. Hence the height of a chip must be at least 1 mm larger than the slot height, i.e. in order to use slot 3B the chip height must be at least 13.0 mm. | ||
As the smaller slots are quite narrow and suffer from a significant y-axis offset, it can be necessary to apply an offset for correct placement. The offset indicated below is the observed offset, hence to counter it one must apply a y-axis offset in the opposite direction. | |||
== Cassette overview == | == Cassette overview == | ||