Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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|+ Cassette overview | |+ Cassette overview | ||
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! Substrate size !! ID !! Slot ID !! Material !! Image !! Slot center coordinates [µm] | ! Substrate size !! ID !! Slot ID !! Material !! Image !! Slot center coordinates [µm] !! Approximate offset [µm] | ||
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| Chips || BM4P-509 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-509_cas.png|800px]] || 3A: (80.000, 60.000) | | Chips || BM4P-509 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-509_cas.png|800px]] || 3A: (80.000, 60.000) || 3A: -810 µm | ||
3B: (200.000, 60.000) | 3B: (200.000, 60.000) | ||