Template:DanchipInfo: Difference between revisions

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| style="background:silver; color:black" align="left"| '''E-beam training'''
| style="background:silver; color:black" align="left"| '''E-beam training'''
|| [mailto:e-beam@nanolab.dtu.dk e-beam@nanolab.dtu.dk]
|| [mailto:e-beam@nanolab.dtu.dk e-beam@nanolab.dtu.dk]
|| To request training on JEOL JBX-9500FSZ or Raith ELPHY e-beam writer. <br> '''Authorization to run JEOL JBX-9500FSZ requires at least 4 training sessions. Before you request for training on this machine, study this page and have all files ready:''' [[Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL_JBX-9500FSZ#Getting_started|Getting started]].
|| To request training on JEOL JBX-9500FSZ or Raith Eline e-beam systems. <br> Please study the material on [[Specific Process Knowledge/Lithography/EBeamLithography|the EBL Labadviser pages.]]
|-
|-
| style="background:LightGrey; color:black" align="left"| '''E-beam load'''
| style="background:LightGrey; color:black" align="left"| '''E-beam load'''

Revision as of 13:58, 4 January 2024

In order to get the quickest response to training requests, process approvals, questions etc. please use the following mailboxes to DTU Nanolab - Fabrication (formerly known as Danchip).

Mailbox link Concerning
LabAdviser Mailbox labadviser@nanolab.dtu.dk Any questions or feedback to LabAdviser.
Process flow review process-flow@nanolab.dtu.dk (should work again) More about process flow review here
Training on equipment training@nanolab.dtu.dk It is our goal to answer your request regarding process flow reviews and training within 2 workdays.
E-beam training e-beam@nanolab.dtu.dk To request training on JEOL JBX-9500FSZ or Raith Eline e-beam systems.
Please study the material on the EBL Labadviser pages.
E-beam load e-beamload@nanolab.dtu.dk To request cassette loading on JEOL JBX-9500FSZ.
Mask order: Photomasks has to be ordered at Compugraphics in Procure. You can read more about the procedure for mask ordering here. It requires a specification file like this: (example spec file) and a design file (gds or cif format).

Mask Review

mask@nanolab.dtu.dk (Subject: Mask Review) Note: You have to order masks at Compugraphics via Procure.

Nanolab can offer a check of the mask design and specifications. You can read more about mask design here.

Metal wishes . .

Lesker:

metal@nanolab.dtu.dk (Subject: Lesker Metal Wishes). - See current and future materials here: Lesker status log

Temescal/Wordentec:

metal@nanolab.dtu.dk (Subject:PVD Metal Wishes) See current and future materials here:
  • Temescal
  • For Wordentec you need to contact the thin film group.
Tool change toolchange@nanolab.dtu.dk Laser: change of optics and
Polymer Injection Molding machine: change mold-tool
Commercial offers etc. sales@nanolab.dtu.dk mostly companies nanolabexternal customers
Gas-related questions DCH-Gas@nanolab.dtu.dk issues (information regarding ordering, delivery, changing etc. Mostly for internal Nanolab use
All other inquiries nanolabsupport@nanolab.dtu.dk ... or if you are in doubt