Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch

Recipe	nano1.0	nano1.1	nano1.2	nano1.3
Tool	Pegasus	Pegasus	Pegasus	Pegasus
C4F8 (sccm)	52	52	52	52
SF6 (sccm)	38	38	38	38
O2 (sccm)	0	0	0	0
Coil power (W)	800 (forward)	600 (forward)	800 (forward)	600 (forward)
Platen power (W)	50	50	50	40
Pressure (mtorr)	4	4	4	4
Temperature (degs C)	10	10	-10	-10
Process time (s)	120	120	120	120
Nominal line width	Etched depths (nm)
30 nm
60 nm
90 nm
120 nm
150 nm
Nominal line width	Etch rates in trenches (nm/min)
30 nm
60 nm
90 nm
120 nm
150 nm
	Etch rates in zep resist (nm/min)
One point on wafer
Images	Images	Images	Images	Images

• ICP Metal Etch nanoetch

The nanoetch