Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions
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|4 | |4 | ||
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! Temperature (degs C) | |||
| 10 | |||
| 10 | |||
| -10 | |||
| -10 | |||
! Process time (s) | ! Process time (s) | ||
|120 | |120 | ||