Specific Process Knowledge/Characterization/SEM Gemini 1: Difference between revisions
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* Inlens SE: In-column high resolution SE detector | * Inlens SE: In-column high resolution SE detector | ||
* In-lens EsB: In-column highly sensitive backscatter electron (BSE) detector for obtaining good material contrast | * In-lens EsB: In-column highly sensitive backscatter electron (BSE) detector for obtaining good material contrast | ||
* aBSD: Retractable | * aBSD: Retractable (and motorized) solid state BSE detector with six sectors for detection of energy and angle selective backscattered electrons, i.e. for obtaining both material and topographical contrast | ||
* VPSE: Variable pressure (VP) light detector for SE signal detecting | * VPSE: Variable pressure (VP) light detector for SE signal detecting | ||
* aSTEM: Retractable solid state STEM detector with five sectors enabling bright field and both annular and oriented dark-field transmission electron imaging | * aSTEM: Retractable (and motorized) solid state STEM detector with five sectors enabling bright field and both annular and oriented dark-field transmission electron imaging | ||
The SEM is a VP (variable pressure) instrument, indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. It has two different VP modes: A standard VP mode like the SEM Supra 1, 2 and 3 and a NanoVP mode. In the standard VP mode, the pressure in the chamber is increased as described above, and the dedicated VPSE detectors or the aBSED detector is used to image charging samples. In Nano VP mode, an retractable beam sleeve aperture is mounted on the column, which makes is possible to use the Inlens SE and the Inlens BSE detectors to obtains high resolution images of non-conducting samples. The SE2 and sSTEM detectors will not work in VP mode. | The SEM is a VP (variable pressure) instrument, indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. It has two different VP modes: A standard VP mode like the SEM Supra 1, 2 and 3 and a NanoVP mode. In the standard VP mode, the pressure in the chamber is increased as described above, and the dedicated VPSE detectors or the aBSED detector is used to image charging samples. In Nano VP mode, an retractable beam sleeve aperture is mounted on the column, which makes is possible to use the Inlens SE and the Inlens BSE detectors to obtains high resolution images of non-conducting samples. The SE2 and sSTEM detectors will not work in VP mode. | ||
The SEM Gemini 1 is located in | The SEM Gemini 1 is located in cleanroom B1. | ||
== Using SEM Gemini 1 == | |||
Click on the link below to access the pages with information on how to use the different modes and detectors. | |||
'''[[Specific Process Knowledge/Characterization/SEM Gemini 1/use|Click here]]''' | |||
'''The user manual, control instruction, the user APV and contact information can be found in LabManager:''' | '''The user manual, control instruction, the user APV and contact information can be found in LabManager:''' | ||