Specific Process Knowledge/Etch/KOH Etch: Difference between revisions
| Line 105: | Line 105: | ||
*Theoretical values: | *Theoretical values: | ||
*1.2 nm/min (60 °C) | *1.2 nm/min (60 °C) | ||
* | *7.5 nm/min (80 °C) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Theoretical values: | *Theoretical values: | ||