Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions
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'''Date:''' Date of the request. | '''Date:''' Date of the request [YYMMDD]. | ||
'''Username:''' Labmanager username. | '''Username:''' Labmanager username. | ||
'''Date and time:''' | '''Date and time:''' Suggest one or two vacant slots in the booking calendar. Make sure you can actually have the substrate ready on time. | ||
'''Cassette and window:''' Select the slot window(s) you would like to use. | '''Cassette and window:''' Select the slot window(s) you would like to use. | ||
'''Job files:''' Job files must either be placed on: | '''Job files:''' Job files must either be placed on: | ||
*The Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs", please create a subfolder as [ | *The Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs", please create a subfolder as [YYMMDD-initials] with the date being the same as put on the request form | ||
*The JEOL 9500 system at /home/eb0/jeoleb/job/1preex/username | *The JEOL 9500 system at /home/eb0/jeoleb/job/1preex/username | ||
*The [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer|JEOL Compilation Computer]] at /home/eb0/jeoleb/job/1PreExposureFiles | *The [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer|JEOL Compilation Computer]] at /home/eb0/jeoleb/job/1PreExposureFiles | ||