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Specific Process Knowledge/Lithography/EBeamLithography/JEOLRequest: Difference between revisions

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'''Date:''' Date of the request.
'''Date:''' Date of the request [YYMMDD].


'''Username:''' Labmanager username.
'''Username:''' Labmanager username.


'''Date and time:''' Find vacant slots in the booking calendar and fill in up to four dates and times that will work for you.
'''Date and time:''' Suggest one or two vacant slots in the booking calendar. Make sure you can actually have the substrate ready on time.


'''Cassette and window:''' Select the slot window(s) you would like to use.  
'''Cassette and window:''' Select the slot window(s) you would like to use.  


'''Job files:''' Job files must either be placed on:
'''Job files:''' Job files must either be placed on:
*The Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs", please create a subfolder as [ddmmyy-initials] with the date being the same as put on the request form
*The Cleanroom drive at "O:\CleanroomDrive\JEOL9500Jobs", please create a subfolder as [YYMMDD-initials] with the date being the same as put on the request form
*The JEOL 9500 system at /home/eb0/jeoleb/job/1preex/username
*The JEOL 9500 system at /home/eb0/jeoleb/job/1preex/username
*The [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer|JEOL Compilation Computer]] at /home/eb0/jeoleb/job/1PreExposureFiles
*The [[Specific Process Knowledge/Lithography/EBeamLithography/JEOL Compilation Computer|JEOL Compilation Computer]] at /home/eb0/jeoleb/job/1PreExposureFiles