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Specific Process Knowledge/Etch/Aluminum Oxide/Al2O3 Etch with ICP Metal: Difference between revisions

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===Results===
===Results===
<gallery caption="Profile view" widths="400px" heights="325px" perrow="3">
<gallery caption="Profile view, etch time 40 min, started with 380 nm zep resist" widths="400px" heights="325px" perrow="3">


Image:S038116_01.jpg
Image:S038116_01.jpg
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