Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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| 8" || BSPCL-514 || 8A || Ti || [[image:BPSPCL-514_cas.png|800px]] || 8A: (189.000, 73.500) | | 8" || BSPCL-514 || 8A || Ti || [[image:BPSPCL-514_cas.png|800px]] || 8A: (189.000, 73.500) | ||
|- | |- | ||
| Mask || B6025-025 || || Ti || [[image:B6025-025.png|800px]] | | Mask || B6025-025 || || Ti || [[image:B6025-025.png|800px]] || (140.000, 120.000) | ||
|} | |} | ||