Specific Process Knowledge/Lithography/EBeamLithography/JEOL 9500 User Guide: Difference between revisions
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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Lithography/EBeamLithography/JEOL 9500 User Guide click here]''' | |||
Content and illustration by Thomas Pedersen, DTU Nanolab unless otherwise noted. | |||
[[File:TPE02803.jpg|right|400px]] | [[File:TPE02803.jpg|right|400px]] | ||
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| colspan="2" style="text-align: center;| | | colspan="2" style="text-align: center;| | ||
Operation screen of the automatic cassette transfer system / auto stocker | Operation screen of the automatic cassette transfer system / auto stocker. | ||
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| colspan="2" style="text-align: center;| | | colspan="2" style="text-align: center;| | ||
Samples can be loaded into appropriate cassettes on the cassette preparation table | Samples can be loaded into appropriate cassettes on the cassette preparation table. | ||
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| colspan="1" style="text-align:center;| | | colspan="1" style="text-align:center;| | ||
Nanolab staff member loading the 4" wafer cassette to the automatic cassette transfer system | Nanolab staff member loading the 4" wafer cassette to the automatic cassette transfer system. | ||
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| colspan="2" style="text-align:center;| | | colspan="2" style="text-align:center;| | ||
'''Calibration''' and '''RESTOR''' windows | '''Calibration''' and '''RESTOR''' windows. | ||
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| colspan="1" style="text-align:center;| | | colspan="1" style="text-align:center;| | ||
Result display of current measurement | Result display of current measurement. | ||
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| colspan="2" style="text-align:center;| | | colspan="2" style="text-align:center;| | ||
Correct result of '''INITAE''' (left) and '''INITBE''' (right) | Correct result of '''INITAE''' (left) and '''INITBE''' (right). | ||
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| colspan="1" style="text-align:center;| | | colspan="1" style="text-align:center;| | ||
Load the '''daily''' batch command and execute it | Load the '''daily''' batch command and execute it. | ||
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| colspan="1" style="text-align:center;| | | colspan="1" style="text-align:center;| | ||
Comparison of two drift measurements | Comparison of two drift measurements. | ||
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| colspan="1" style="text-align:center;| | | colspan="1" style="text-align:center;| | ||
Parameter window of the '''HEIMAP''' subprogram | Parameter window of the '''HEIMAP''' subprogram. | ||
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| colspan="1" style="text-align:center;| | | colspan="1" style="text-align:center;| | ||
Acquire the calibration data and then apply the data to save | Acquire the calibration data and then apply the data to save. | ||
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| colspan="1" style="text-align:center;| | | colspan="1" style="text-align:center;| | ||
'''Expose''' window with .mgn file loaded for exposure. Notice that the '''Progress''' part of the window still shows the previous exposure information. This field will not update until exposure is started | '''Expose''' window with .mgn file loaded for exposure. Notice that the '''Progress''' part of the window still shows the previous exposure information. This field will not update until exposure is started. | ||
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